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1

Mechanical Properties of TiN Films Deposited on Aluminium Substrates by Arc Ion Plating Method.

MIKI, Yasuhiro, TANIGUCHI, Tadashi, KUSAKA, Kazuya, HANABUSA, Takao, MAITANI, Eiji

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A

Year:

1999

File:

PDF, 905 KB

1999

2

In-situ Thermal Stress Measurement in Multi-layered Aluminum Nitride and Copper Films by Synchrotron Radiation

KUSAKA, Kazuya, HANABUSA, Takao, KANEKO, Kenta, MATSUE, Tatsuya, SAKATA, Osami

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A

Year:

2008

Language:

english

File:

PDF, 763 KB

english, 2008

3

Stress Estimation of Titanium Casting Alloy by X-Ray Measurement Technique of Single Crystal

Nishida, Masayuki, Hanabusa, Takao, Shiro, Ayumi, Matsue, Tatsuya

Journal:

Materials Science Forum

Year:

2010

Language:

english

File:

PDF, 406 KB

english, 2010

4

Residual Stress and In-situ Thermal Stress Measurements of Copper Films on Glass Substrate

HANABUSA, Takao, NISHIDA, Masayuki

Journal:

Journal of the Society of Materials Science Japan

Year:

2001

Language:

english

File:

PDF, 3.17 MB

english, 2001

5

Measurement of electromigration-induced stress in aluminum alloy interconnection

Kazuya Kusaka, Takao Hanabusa, Shoso Shingubara, Tatsuya Matsue, Osami Sakata

Journal:

Year:

2008

Language:

english

File:

PDF, 383 KB

english, 2008

6

Residual stress and its thermal relaxation in TiN films

Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 394 KB

english, 1996

7

Effect of nitrogen gas pressure on residual stress in A1N films deposited by the planar magnetron sputtering system

Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 371 KB

english, 1996

8

Residual stress and thermal stress observation in thin copper films

Takao Hanabusa, Kazuya Kusaka, Osami Sakata

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 353 KB

english, 2004

9

Effect of heating on the residual stresses in TiN films investigated using synchrotron radiation

Tatsuya Matsue, Takao Hanabusa, Kazuya Kusaka, Osami Sakata

Journal:

Year:

2008

Language:

english

File:

PDF, 436 KB

english, 2008

10

The structure of TiN films deposited by arc ion plating

Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi

Journal:

Year:

2002

Language:

english

File:

PDF, 157 KB

english, 2002

11

TiN films prepared by unbalanced planar magnetron sputtering under control of photoemission of Ti

Kikuo Tominaga, Shozo Inoue, Ronald P. Howson, Kazuya Kusaka, Takao Hanabusa

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 413 KB

english, 1996

12

Residual Stress Measurement in Sputtered Copper Thin Films by Synchrotron Radiation and Ordinary X-Rays

Hataya, Mitsuhiko, Hanabusa, Takao, Kusaka, Kazuya, Tominaga, Kikuo, Matsue, Tatsuya, Sakata, Osami

Journal:

Materials Science Forum

Year:

2005

Language:

english

File:

PDF, 273 KB

english, 2005

13

Stress-Assisted Atomic Migration in Thin Copper Films

Hanabusa, Takao, Kusaka, Kazuya, Kaneko, Kenta, Sakata, Osami, Nishida, Masayuki

Journal:

Key Engineering Materials

Year:

2007

Language:

english

File:

PDF, 2.85 MB

english, 2007

14

Influence of Target Shape on Properties of AlN Sputtered Film

Tominaga, Kikuo, Sato, Yoshifumi, Mori, Ichiro, Kusaka, Kazuya, Hanabusa, Takao

Journal:

Japanese Journal of Applied Physics

Year:

1998

File:

PDF, 537 KB

1998

15

An Attempt of “Monotsukuri Education” by Sharing Method

ISHIZAKI, Shigetoshi, OZAKI, Jun-ichi, SAITO, Shigeru, NAKATSUJI, Takeshi, HANABUSA, Takao

Journal:

Journal of JSEE

Year:

2010

File:

PDF, 1.12 MB

2010

16

Effect of Substrate Temperature on Crystal Orientation and Residual Stress in RF Sputtered Gallium Nitride Films

Kusaka, Kazuya, Hanabusa, Takao, Tominaga, Kikuo, Yamauchi, Noriyoshi

Journal:

Materials Science Forum

Year:

2005

Language:

english

File:

PDF, 247 KB

english, 2005

17

X-Ray Residual Stress Analysis of Aluminum Nitride Film with c-Axis Orientation on Glass Substrate.

HANABUSA, Takao, TOMINAGA, Kikuo, FUJIWARA, Haruo

Journal:

Journal of the Society of Materials Science Japan

Year:

1993

File:

PDF, 843 KB

1993

18

Measurement of Micro Residual Stresses Near the Grain Boundary in Copper Bicrystal

Shiro, Ayumi, Hanabusa, Takao, Okada, Tatsuya, Nishida, Masayuki, Kusaka, Kazuya, Sakata, Osami

Journal:

Advanced Materials Research

Year:

2010

Language:

english

File:

PDF, 1.13 MB

english, 2010

19

Internal Stress Analysis of Long Fiber Reinforced Materials

Nishida, Masayuki, Hanabusa, Takao, Ikeuchi, Yasukazu

Journal:

International Journal of Modern Physics B

Year:

2003

Language:

english

File:

PDF, 277 KB

english, 2003

20

In situ stress measurement of fiber reinforced composite in low temperature state by neutron diffraction

Nishida, Masayuki, Jing, Tian, Muslih, M. Refai, Doi, Taisei, Matsue, Tatsuya, Hanabusa, Takao

Journal:

Modern Physics Letters B

Year:

2015

Language:

english

File:

PDF, 202 KB

english, 2015

21

Micro Stresses within Cu Bi-Crystal and Al Tri-Crystal after Plastic Deformation Observed by X-Ray and Neutron Diffraction

Shiro, Ayumi, Masayuki, Nishida, Muslih, M.Refai, Okada, Tatsuya, Takao, Hanabusa

Journal:

Materials Science Forum

Year:

2013

Language:

english

File:

PDF, 1.11 MB

english, 2013

22

GaN films deposited by planar magnetron sputtering

T Kikuma, K Tominaga, K Furutani, Kazuya Kusaka, Takao Hanabusa, Takashi Mukai

Journal:

Year:

2002

Language:

english

File:

PDF, 148 KB

english, 2002

23

X-Ray Investigation on Strength of Thin Films

Hanabusa, Takao, Shinohara, Mitsuhiko

Journal:

Materials Science Forum

Year:

2010

Language:

english

File:

PDF, 494 KB

english, 2010

24

Effect of external magnetic field on c-axis orientation and residual stress in AlN films

Kazuya Kusaka, Takahiro Ao, Takao Hanabusa, Kikuo Tominaga

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 335 KB

english, 1998

25

Residual stress in TiN film deposited by arc ion plating

Tatsuya Matsue, Takao Hanabusa, Yasuhiro Miki, Kazuya Kusaka, Eiji Maitani

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 351 KB

english, 1999

26

Alteration of internal stresses in SiO2/Cu/TiN thin films by X-ray and synchrotron radiation due to heat treatment

Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi, Kazuya Kusaka, Osami Sakata

Journal:

Year:

2006

Language:

english

File:

PDF, 276 KB

english, 2006

27

116 X-ray Residual Stress Evaluation of Laser Peened Surface

Nishiike, Makoto, Kusaka, Kazuya, Hanabusa, Takao

Journal:

The Proceedings of Conference of Chugoku-Shikoku Branch

Year:

2000

File:

PDF, 253 KB

2000

28

X-Ray Residual Stress Measurment of AlN Films, IV. Residual Stress Measurement in AlN Film Deposited by Alternating Sputtering Method.

KUSAKA, Kazuya, HANABUSA, Takao, TOMINAGA, Kikuo, AO, Takahiro

Journal:

Journal of the Society of Materials Science Japan

Year:

1997

File:

PDF, 1.19 MB

1997

29

Photoinitiation effect during photo-induced deposition of aluminum films using dimethylaluminum hydride

Takao Kawai, Masahiro Okawa, Atsushi Komatsu, Tetsuya Shimada, Mitsugu Hanabusa

Journal:

Applied Surface Science

Year:

1994

Language:

english

File:

PDF, 235 KB

english, 1994

30

Dependence to processing conditions of structure in TiN films deposited by arc ion plating

Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi

Journal:

Year:

2004

Language:

english

File:

PDF, 336 KB

english, 2004

31

Effect of a plasma protection net on residual stress in AlN films deposited by a magnetron sputtering system

Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 253 KB

english, 1996

32

Effect of substrate temperature on crystal orientation and residual stress in radio frequency sputtered gallium–nitride films

Kusaka, Kazuya, Hanabusa, Takao, Tominaga, Kikuo, Yamauchi, Noriyoshi

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2004

Language:

english

File:

PDF, 375 KB

english, 2004

33

Evaluation of Internal Stresses in Single-, Double- and Multi-Layered TiN and TiAlN Thin Films by Synchrotron Radiation

HANABUSA, Takao, KUSAKA, Kazuya, MATSUE, Tatsuya, NISHIDA, Masayuki, SAKATA, Osami, SATO, Toshiki

Journal:

JSME International Journal Series A

Year:

2004

Language:

english

File:

PDF, 645 KB

english, 2004

34

Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr

Kikuo Tominaga, Takuya Kikuma, Kazuya Kusaka, Takao Hanabusa

Journal:

Year:

2002

Language:

english

File:

PDF, 149 KB

english, 2002

35

Evaluation for Teacher's Contribution on Teaching Activity

HANABUSA, Takao

Journal:

Journal of JSEE

Year:

2007

File:

PDF, 1.20 MB

2007

36

THERMAL STRESS BEHAVIOR IN NANO-SIZE THIN ALUMINUM FILMS

HANABUSA, TAKAO, KUSAKA, KAZUYA, SHINGUBARA, SHOSO, SAKATA, OSAMI

Journal:

International Journal of Modern Physics B

Year:

2006

Language:

english

File:

PDF, 270 KB

english, 2006

37

LOW TEMPERATURE IN-SITU STRESS MEASUREMENT OF W/Cu COMPOSITE BY NEUTRON DIFFRACTION

NISHIDA, MASAYUKI, MUSLIH, M. RIFAI, IKEUCHI, YASUKAZU, MINAKAWA, NOBUAKI, HANABUSA, TAKAO

Journal:

International Journal of Modern Physics B

Year:

2006

Language:

english

File:

PDF, 285 KB

english, 2006

38

Residual Stress Measurement Of High Molecular Matter By Transmission X-Ray Diffraction

Kitamura, Masashi, Nishida, Masayuki, Hanabusa, Takao

Journal:

Materials Science Forum

Year:

2011

Language:

english

File:

PDF, 373 KB

english, 2011

39

Thermal Stress Estimation of Tungsten Fiber Reinforced Titanium Composite by In Situ X-Ray Diffraction Method

Masayuki, Nishida, Masashi, Haneoka, Tatsuya, Matsue, Tian, Jing, Takao, Hanabusa

Journal:

Materials Science Forum

Year:

2013

Language:

english

File:

PDF, 947 KB

english, 2013

40

Report of Questionnaring on Evaluation for Teacher's Contribution on Teaching Activity

HANABUSA, Takao

Journal:

Journal of JSEE

Year:

2007

File:

PDF, 1.19 MB

2007

41

Change in Residual Stress of TiN Coating Material during Heat Treatment in an Air Atmosphere

Matsue, Tatsuya, Nishida, Masayuki, Hanabusa, Takao

Journal:

Advanced Materials Research

Year:

2015

Language:

english

File:

PDF, 406 KB

english, 2015

42

X-ray residual stress measurement of laminated coating layers produced by plasma spraying

Masayuki Nishida, Takao Hanabusa, Haruo Fujiwara

Journal:

Surface and Coatings Technology

Year:

1993

Language:

english

File:

PDF, 494 KB

english, 1993

43

X-ray Residual Stress Measurement of Fiber Reinforced Plastic Composite

NISHIDA, Masayuki, KITAMURA, Masashi, HANABUSA, Takao, MATSUE, Tatsuya

Journal:

Journal of Solid Mechanics and Materials Engineering

Year:

2010

Language:

english

File:

PDF, 487 KB

english, 2010

44

X-RAY MEASUREMENT OF STRESSES IN DEPOSITED THIN FILM WITH FIBER TEXTURE

HANABUSA, Takao

Journal:

Journal of the Society of Materials Science Japan

Year:

1999

File:

PDF, 1.85 MB

1999

45

Residual Stresses of Cr-N Films Deposited by Arc Ion Plating Investigated Using Synchrotron Radiation

Matsue, Tatsuya, Hanabusa, Takao, Kusaka, Kazuya, Sakata, Osami, Nishida, Masayuki

Journal:

Materials Science Forum

Year:

2010

Language:

english

File:

PDF, 1.89 MB

english, 2010

46

Internal Stress Measurement of Fiber Reinforced Composite by Neutron Diffraction with In Situ Low Temperature Stress Measurement System

Nishida, Masayuki, Muslih, M.Refai, Ikeuchi, Yasukazu, Minakawa, Nobuaki, Hanabusa, Takao

Journal:

Materials Science Forum

Year:

2005

Language:

english

File:

PDF, 379 KB

english, 2005

47

Neutron Stress Measurement of Coarse Crystal Grain in Aluminum Casting Alloy

Nishida, Masayuki, Hanabusa, Takao, Matsue, Tatsuya, Suzuki, Hiroshi

Journal:

Materials Science Forum

Year:

2010

Language:

english

File:

PDF, 311 KB

english, 2010

48

Gas Pressure Dependence of AlN Film Properties in Alternating Sputtering System

Tominaga, Kikuo, Ao, Takahiro, Mori, Ichiro, Kusaka, Kazuya, Hanabusa, Takao

Journal:

Japanese Journal of Applied Physics

Year:

1996

Language:

english

File:

PDF, 383 KB

english, 1996

49

X-Ray Stress Measurement on the Cementite Phase in Steels

HANABUSA, Takao, FUKURA, Jiro, FUJIWARA, Haruo

Journal:

Bulletin of JSME

Year:

1969

File:

PDF, 1.12 MB

1969

50

X-Ray Stress Measurement on the Cementite Phase in Steel

HANABUSA, Takao, FUKURA, Jiro, FUJIWARA, Haruo

Journal:

Transactions of the Japan Society of Mechanical Engineers

Year:

1969

File:

PDF, 1.00 MB

1969

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